Target manufacturing and application
The casting method of titanium aluminum alloy targets cannot avoid porosity and shrinkage. Large-size titanium aluminum cast pipes and ingots cannot guarantee the sealing and waterproof effect of the rotating tube target, and as the tube wall is etched, the wall thickness changes Thin, loose and shrinkage holes as long as there is a hole connected, the sealing will become worse. The lighter ones will leak, the target tube will start to discharge, or a large amount of impurity will participate in the reaction and cause the film to fall off or the color is not correct. In severe cases, water is injected directly into the vacuum chamber from the shrinkage cavity, which will contaminate the real cavity and the vacuum unit.
There is no problem of porosity and shrinkage in the production of titanium aluminum target by powder metallurgy process, but from the microscopic point of view of powder metallurgy, it is also a porous material, so if you want to make titanium aluminum rotating tube target, the material density is very strict, and the density needs to be greater than 98 %, but it does not mean it can be used if it meets the density requirements. If the oxygen content of the titanium-aluminum ingot is high and the microstructure is unreasonable, the titanium-aluminum ingot has high internal stress and is easy to collapse, and it cannot be used as a rotating tube target. Therefore, there are many requirements in powder production and particle size ratio. Even if these conditions are met, the powder metallurgy titanium aluminum ring needs to be tied to the stainless steel tube or the titanium tube. Due to the large thermal expansion coefficient of titanium and aluminum, the local target expansion may reach 0.5 ~ 1m during sputtering, so the traditional ingot binding is now The method cannot effectively solve this problem. The titanium-aluminum binding ingot is separated, and the target can not conduct and burst. However, the tight matching bond is unreliable, and the quality of the plasma sprayed titanium aluminum alloy target is poor.
In the ONL watch, jewelry, and eyewear industries, there are many recent requirements for decorative coating rose gold to not contain carbon and to further make the underlying rose color close to the face rose gold. In our opinion, TiCN can no longer meet the requirements. TiAIN is the solution. Low-end watch jewelry does not have film thickness and gloss requirements. Most of them use arc titanium aluminum targets to deposit TiAIN. High-end brand watches require a thickness of more than 1um, and the gloss cannot be decline.
